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MIT Technology Review3 min read

The $400 million machine powering the future of chipmaking

ASML unveiled a new lithography machine, costing approximately $400 million, designed to create increasingly tiny circuitry for advanced microchips. Jos Benschop, executive vice president of technology at ASML, described the machine as a "double-decker bus" weighing over 150 tons, composed of "mechatronic devices that hold a few mirrors in a position with atomic precision." This technology is crucial for manufacturing powerful chips used in devices like smartphones and AI systems. ASML, a Dutch company, is a primary supplier of these essential lithography machines, alongside TSMC, a major chip manufacturer. The new machine utilizes extreme-ultraviolet (EUV) light, a form of radiation produced by shooting lasers at tiny molten tin droplets thousands of times per second. This advanced EUV technology allows for the creation of transistor features with a resolution of eight nanometers, an improvement over ASML's earlier EUV machines introduced nine years ago. Those initial machines, developed over 16 years with an R&D investment of about $10 billion, could craft features with a 13-nanometer resolution. The development of these sophisticated machines represents a significant technological leap in the microchip industry.

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